JPH0418446U - - Google Patents
Info
- Publication number
- JPH0418446U JPH0418446U JP5921390U JP5921390U JPH0418446U JP H0418446 U JPH0418446 U JP H0418446U JP 5921390 U JP5921390 U JP 5921390U JP 5921390 U JP5921390 U JP 5921390U JP H0418446 U JPH0418446 U JP H0418446U
- Authority
- JP
- Japan
- Prior art keywords
- sample
- installation surface
- adsorbing
- measures
- clamping
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000009434 installation Methods 0.000 claims 3
- 238000000034 method Methods 0.000 claims 1
- 239000002245 particle Substances 0.000 claims 1
- 238000001179 sorption measurement Methods 0.000 description 1
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5921390U JPH0418446U (en]) | 1990-06-06 | 1990-06-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5921390U JPH0418446U (en]) | 1990-06-06 | 1990-06-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0418446U true JPH0418446U (en]) | 1992-02-17 |
Family
ID=31585513
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5921390U Pending JPH0418446U (en]) | 1990-06-06 | 1990-06-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0418446U (en]) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2006022328A1 (ja) * | 2004-08-25 | 2006-03-02 | Tokyo Electron Limited | 成膜装置および成膜方法 |
| JP2007052138A (ja) * | 2005-08-16 | 2007-03-01 | Fujifilm Holdings Corp | ワーク固定装置及びその位置決め方法並びに画像形成装置 |
-
1990
- 1990-06-06 JP JP5921390U patent/JPH0418446U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2006022328A1 (ja) * | 2004-08-25 | 2006-03-02 | Tokyo Electron Limited | 成膜装置および成膜方法 |
| JP2007052138A (ja) * | 2005-08-16 | 2007-03-01 | Fujifilm Holdings Corp | ワーク固定装置及びその位置決め方法並びに画像形成装置 |